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CONTROL & DESIGN
STANDARDS: MONITORING |
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Proper monitoring of the cleanroom environment
is vital in controlling contaminants. To this end, four monitoring objectives
must always be met:
- High sensitivity - so changes can be detected before reaching critical
levels.
- Real time display and alarms - so personnel are aware of possible
problems.
- High reliability - to minimize false alarms and down times.
- Data records - recorded in a form readily accessible for inspection
and analysis.
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